A growing need exists for efficient and accurate methods for detecting defects in semiconductor materials and devices. These defects can have a detrimental impact on the efficiency of the manufacturing process, because they cause critical failures and wafer-yield limitations. As nodes and patterns get smaller, even high-resolution imaging techniques such as Scanning Electron Microscopy (SEM) produce noisy images due to operating close to sensitivity levels and due to varying physical properties of different underlayers or resist materials. This inherent noise is one of the main challenges for defect inspection. One promising approach is the use of machine learning algorithms, which can be trained to accurately classify and locate defects in semiconductor samples. Recently, convolutional neural networks have proved to be particularly useful in this regard. This systematic review provides a comprehensive overview of the state of automated semiconductor defect inspection on SEM images, including the most recent innovations and developments. 38 publications were selected on this topic, indexed in IEEE Xplore and SPIE databases. For each of these, the application, methodology, dataset, results, limitations and future work were summarized. A comprehensive overview and analysis of their methods is provided. Finally, promising avenues for future work in the field of SEM-based defect inspection are suggested.
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Event logs are invaluable for conducting process mining projects, offering insights into process improvement and data-driven decision-making. However, data quality issues affect the correctness and trustworthiness of these insights, making preprocessing tasks a necessity. Despite the recognized importance, the execution of preprocessing tasks remains ad-hoc, lacking support. This paper presents a systematic literature review that establishes a comprehensive repository of preprocessing tasks and their usage in case studies. We identify six high-level and 20 low-level preprocessing tasks in case studies. Log filtering, transformation, and abstraction are commonly used, while log enriching, integration, and reduction are less frequent. These results can be considered a first step in contributing to more structured, transparent event log preprocessing, enhancing process mining reliability.
Simulations of turbulent flows in 3D are one of the most expensive simulations in computational fluid dynamics (CFD). Many works have been written on surrogate models to replace numerical solvers for fluid flows with faster, learned, autoregressive models. However, the intricacies of turbulence in three dimensions necessitate training these models with very small time steps, while generating realistic flow states requires either long roll-outs with many steps and significant error accumulation or starting from a known, realistic flow state - something we aimed to avoid in the first place. Instead, we propose to approach turbulent flow simulation as a generative task directly learning the manifold of all possible turbulent flow states without relying on any initial flow state. For our experiments, we introduce a challenging 3D turbulence dataset of high-resolution flows and detailed vortex structures caused by various objects and derive two novel sample evaluation metrics for turbulent flows. On this dataset, we show that our generative model captures the distribution of turbulent flows caused by unseen objects and generates high-quality, realistic samples amenable for downstream applications without access to any initial state.
Markov Decision Processes (MDPs) are a formal framework for modeling and solving sequential decision-making problems. In finite-time horizons such problems are relevant for instance for optimal stopping or specific supply chain problems, but also in the training of large language models. In contrast to infinite horizon MDPs optimal policies are not stationary, policies must be learned for every single epoch. In practice all parameters are often trained simultaneously, ignoring the inherent structure suggested by dynamic programming. This paper introduces a combination of dynamic programming and policy gradient called dynamic policy gradient, where the parameters are trained backwards in time. For the tabular softmax parametrisation we carry out the convergence analysis for simultaneous and dynamic policy gradient towards global optima, both in the exact and sampled gradient settings without regularisation. It turns out that the use of dynamic policy gradient training much better exploits the structure of finite-time problems which is reflected in improved convergence bounds.
In pace with developments in the research field of artificial intelligence, knowledge graphs (KGs) have attracted a surge of interest from both academia and industry. As a representation of semantic relations between entities, KGs have proven to be particularly relevant for natural language processing (NLP), experiencing a rapid spread and wide adoption within recent years. Given the increasing amount of research work in this area, several KG-related approaches have been surveyed in the NLP research community. However, a comprehensive study that categorizes established topics and reviews the maturity of individual research streams remains absent to this day. Contributing to closing this gap, we systematically analyzed 507 papers from the literature on KGs in NLP. Our survey encompasses a multifaceted review of tasks, research types, and contributions. As a result, we present a structured overview of the research landscape, provide a taxonomy of tasks, summarize our findings, and highlight directions for future work.
The existence of representative datasets is a prerequisite of many successful artificial intelligence and machine learning models. However, the subsequent application of these models often involves scenarios that are inadequately represented in the data used for training. The reasons for this are manifold and range from time and cost constraints to ethical considerations. As a consequence, the reliable use of these models, especially in safety-critical applications, is a huge challenge. Leveraging additional, already existing sources of knowledge is key to overcome the limitations of purely data-driven approaches, and eventually to increase the generalization capability of these models. Furthermore, predictions that conform with knowledge are crucial for making trustworthy and safe decisions even in underrepresented scenarios. This work provides an overview of existing techniques and methods in the literature that combine data-based models with existing knowledge. The identified approaches are structured according to the categories integration, extraction and conformity. Special attention is given to applications in the field of autonomous driving.
With the extremely rapid advances in remote sensing (RS) technology, a great quantity of Earth observation (EO) data featuring considerable and complicated heterogeneity is readily available nowadays, which renders researchers an opportunity to tackle current geoscience applications in a fresh way. With the joint utilization of EO data, much research on multimodal RS data fusion has made tremendous progress in recent years, yet these developed traditional algorithms inevitably meet the performance bottleneck due to the lack of the ability to comprehensively analyse and interpret these strongly heterogeneous data. Hence, this non-negligible limitation further arouses an intense demand for an alternative tool with powerful processing competence. Deep learning (DL), as a cutting-edge technology, has witnessed remarkable breakthroughs in numerous computer vision tasks owing to its impressive ability in data representation and reconstruction. Naturally, it has been successfully applied to the field of multimodal RS data fusion, yielding great improvement compared with traditional methods. This survey aims to present a systematic overview in DL-based multimodal RS data fusion. More specifically, some essential knowledge about this topic is first given. Subsequently, a literature survey is conducted to analyse the trends of this field. Some prevalent sub-fields in the multimodal RS data fusion are then reviewed in terms of the to-be-fused data modalities, i.e., spatiospectral, spatiotemporal, light detection and ranging-optical, synthetic aperture radar-optical, and RS-Geospatial Big Data fusion. Furthermore, We collect and summarize some valuable resources for the sake of the development in multimodal RS data fusion. Finally, the remaining challenges and potential future directions are highlighted.
As an effective strategy, data augmentation (DA) alleviates data scarcity scenarios where deep learning techniques may fail. It is widely applied in computer vision then introduced to natural language processing and achieves improvements in many tasks. One of the main focuses of the DA methods is to improve the diversity of training data, thereby helping the model to better generalize to unseen testing data. In this survey, we frame DA methods into three categories based on the diversity of augmented data, including paraphrasing, noising, and sampling. Our paper sets out to analyze DA methods in detail according to the above categories. Further, we also introduce their applications in NLP tasks as well as the challenges.
Data transmission between two or more digital devices in industry and government demands secure and agile technology. Digital information distribution often requires deployment of Internet of Things (IoT) devices and Data Fusion techniques which have also gained popularity in both, civilian and military environments, such as, emergence of Smart Cities and Internet of Battlefield Things (IoBT). This usually requires capturing and consolidating data from multiple sources. Because datasets do not necessarily originate from identical sensors, fused data typically results in a complex Big Data problem. Due to potentially sensitive nature of IoT datasets, Blockchain technology is used to facilitate secure sharing of IoT datasets, which allows digital information to be distributed, but not copied. However, blockchain has several limitations related to complexity, scalability, and excessive energy consumption. We propose an approach to hide information (sensor signal) by transforming it to an image or an audio signal. In one of the latest attempts to the military modernization, we investigate sensor fusion approach by investigating the challenges of enabling an intelligent identification and detection operation and demonstrates the feasibility of the proposed Deep Learning and Anomaly Detection models that can support future application for specific hand gesture alert system from wearable devices.
Traffic forecasting is an important factor for the success of intelligent transportation systems. Deep learning models including convolution neural networks and recurrent neural networks have been applied in traffic forecasting problems to model the spatial and temporal dependencies. In recent years, to model the graph structures in the transportation systems as well as the contextual information, graph neural networks (GNNs) are introduced as new tools and have achieved the state-of-the-art performance in a series of traffic forecasting problems. In this survey, we review the rapidly growing body of recent research using different GNNs, e.g., graph convolutional and graph attention networks, in various traffic forecasting problems, e.g., road traffic flow and speed forecasting, passenger flow forecasting in urban rail transit systems, demand forecasting in ride-hailing platforms, etc. We also present a collection of open data and source resources for each problem, as well as future research directions. To the best of our knowledge, this paper is the first comprehensive survey that explores the application of graph neural networks for traffic forecasting problems. We have also created a public Github repository to update the latest papers, open data and source resources.
Deep learning methods are achieving ever-increasing performance on many artificial intelligence tasks. A major limitation of deep models is that they are not amenable to interpretability. This limitation can be circumvented by developing post hoc techniques to explain the predictions, giving rise to the area of explainability. Recently, explainability of deep models on images and texts has achieved significant progress. In the area of graph data, graph neural networks (GNNs) and their explainability are experiencing rapid developments. However, there is neither a unified treatment of GNN explainability methods, nor a standard benchmark and testbed for evaluations. In this survey, we provide a unified and taxonomic view of current GNN explainability methods. Our unified and taxonomic treatments of this subject shed lights on the commonalities and differences of existing methods and set the stage for further methodological developments. To facilitate evaluations, we generate a set of benchmark graph datasets specifically for GNN explainability. We summarize current datasets and metrics for evaluating GNN explainability. Altogether, this work provides a unified methodological treatment of GNN explainability and a standardized testbed for evaluations.
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